Corial SAS is a leading supplier of deposition and etch equipment using PECVD, RIE and high density plasma etch processes including Microwave, DECR and ICP.  The Corial team have over 200 man years accumulated experience in plasma processing and developing processes for diverse applications including  MEMS, LEDs and Optoelectronics.    Corial technology and proceses are available for integration within Evatec's Radiance cluster  platform or as stand alone deposition and etch tools. For detailed information contact your local Evatec sales representative or visit Corial