Evatec offers sputter technologies for DC, mid frequency AC or RF sputter with closed loop controlled process gas inlets for reactive processes. Cathode size and configuration are dependent upon the coating platform.

Evatec's MSP is a dedicated high throughput batch system for precision optics. It employs 4 cathodes in vertical configuration to create dense optical films with superb optical and environmental stabilities. Proprietary tuneable cathode technology combined with in situ closed loop Optical and Plasma Emission Monitoring techniques enable cut on/off tolerances better than +/- 1% over large areas.

Sputter technology for substrate sizes up to 12 inch is also now available through Evatec's new Radiance platform.

Contact your local Evatec sales and service representative to enquire about custom sputter solutions for both optical and semiconductor applications.