Good system and process control lies at the heart of achieving industry leading throughput and yields.

Software Platforms

With 50 years experience in developing dedicated platforms along with our customers we learnt the requirements are simple.

• Flexible enough for process designers
• Easy to use for operations and maintenance
• Powerful enough for production and quality control

Today’s state of the art "Khan" offers full closed loop and data logging from system pump down to vent.

Process control technology

From our QSK610, 6 way quartz crystal monitoring system to our broadband optical monitor GSM1100 we offer a comprehensive range of deposition control options. For environmental control we offer integrated RGAs and Sputter Process Monitors. For complex co-deposition, thick layer and other special process requirements we offer customized solutions. Contact us for more information.