From III-V to Silicon, Evatec offers dedicated high throughput systems for metallization and passivation layers for wafer sizes up to 8 inch with its range of Balzers BAK box coaters. High energy etch sources can be added for custom cleaning or high uniformity etch processes.

With experience across a whole range of applications including Power Devices, SAW, Advanced Packaging and general wafer metallization, our custom hardware and process solutions include

• thin wafer handling
• film stress compensation
• automated wafer loading
• flip systems for simultaneous coating of front and backside

Please contact your local Sales and Service Office to discuss your individual needs.