MSP Sputter Tool

The MSP is a dedicated high throughput batch sputter tool for precision optics and optoelectronics

It offers significant advantages for production of high end layers including adge & bandpass filters, AR coatings and TCOs

  • elimination of test  runs when changing  between processes
  • outstanding process repeatibilities even for non consecutive runs
  • low temperature processing for sensitive substrate materials

Just take a look at the results !

click to enlarge

MSP Front View

4 vertically mounted cathodes

High uniformity without masks

Colour wheels