BAK501: The small machine for big ideas
With all the same capability as its big brother's but a footprint of only 2m², the BAK501 is the perfect choice where cleanroom space is at a premium, or coating areas are small.
BAK501 in a nutshell
- Low materials utilization
- Perfect for R&D or production on small substrate sizes
- All the capabilities of bigger BAK platforms
- Custom build versions on request including UHV variants
Available in standard, extended throw and split chamber versions, the BAK501 is the perfect base for customization as a R&D platform before scaling up to large substrate sizes and throughputs. Equip the system today with thermal, e gun or ion sources and rebuild it tomorrow with any of the other sources from the BAK source portfolio. Ask about Evatec engineering support including custom tooling to configure a BAK 501 platform that’s just right for you or download our complete BAK platform overview brochure below.