BAK501: The small machine for big ideas

With all the same capability as its big brother's but a footprint of only 2m², the BAK501 is the perfect choice where cleanroom space is at a premium, or coating areas are small.

BAK501 in a nutshell

  • Low materials utilization
  • Perfect for R&D or production on small substrate sizes
  • All the capabilities of bigger BAK platforms
  • Custom build versions on request including UHV variants
BAK501- Typical layout View brochure online

Platform overview

Available in standard, extended throw and split chamber versions, the BAK501 is the perfect base for customization as a R&D platform before scaling up to large substrate sizes and throughputs. Equip the system today with thermal, e gun or ion sources and rebuild it tomorrow with any of the other sources from the BAK source portfolio. Ask about Evatec engineering support including custom tooling to configure a BAK 501 platform that’s just right for you or download our complete BAK platform overview brochure below.

Build your BAK

BAK resources

The BAK501- The small machine for big ideasView BAK501: The small machine for big ideas image galleryView BAK501: The small machine for big ideas image galleryView BAK501: The small machine for big ideas image galleryView BAK501: The small machine for big ideas image galleryView BAK501: The small machine for big ideas image galleryView BAK501: The small machine for big ideas image galleryView BAK501: The small machine for big ideas image galleryView BAK501: The small machine for big ideas image gallery