BAK 761/ SAW

Supreme flexibility

Configuration

 

Standard

Up to three E Guns

Khan system & process controller

Options

Extended "throw" version for special lift off processes

Enhanced throughput systems

Etch and PIAD sources

Automated substrate handling  [learn more]

click to enlarge

BAK 701 with compact footprint

Extended throw of 1000mm

Multiple source options

High speed pumping solution