Eliminate manual handing with Evatec’s handling solution for calotte fill and load to your BAK.
BAK Autoload in a nutshell
- Cassette to cassette operation
- Full wafer tracking within the calotte
- Cassette station for integration of dummy and metrology wafers
With cassette to cassette handling for wafer sizes up to 8 inch, BAK Autoload completely eliminates manual handling of wafers saving time, eliminating operator errors and reducing costs. BAK Autoload takes care of all necessary steps including wafer alignment for flat or notch, preloading domes and complete dome exchange through a side port in the coater. Precise control of robot and handling environment avoids potential sources of damage or contamination. Full integration with Evatec’s Khan process controller ensures seamless hardware management.
And now you can even integrate a vacuum load lock for the complete dome !