From the smallest 0.5m diameter BAK501 designed for just 32 "2 inch substrates" to the largest BAK1401 with a capacity of more than 300, the BAK family is designed for coating of standard substrates sizes up to 8 inch diameter in different batch sizes. Additional customized tooling options including Knudsen Planetary systems are available for handling complex geometries and process requirements within the standard BAK platform range.

The flexible mid size BAK761 remains a firm favorite for both development and production and is available in an extended throw version "BAK SAW" for special semiconductor lift off and etch applications.

The BAP801 mid size low voltage reactive ion plating system with its fully integrated plasma source is tailored for critical optoelectronic and semiconductor applications.

For applications using highly reactive source materials, the SAMSON Split chamber system has a separate source chamber and completes the current range.

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BAK501, BAK641, BAK761/ BAKSAW, Samson, BAP801, BAK1101, Super Size & Custom Platforms.