Evatec offers both quartz and optical monitoring solutions according to process platform, deposition process and  application.

The QSK621  6 way quartz head is an ideal solution for many evaporation processes on the BAK platform.  Full Khan integration handles crystal errors mid process with ease ensuring batch evaporation processes can be completed without loss. For co deposition and thick layer processes Evatec offers custom hardware and software solutions.

The GSM1100 Optical Monitor offers enhanced accuracy and repeatability and  is  ideal for the most demanding processes in the UV, VIS or IR. It can be configured for indirect or direct (broadband) operation and can be integrated within Evatec's range of BAK, MSP and Radiance process platforms. 

From May 2011 Evatec's "Optics Toolbox" integrates  QSK or GSM, coater , a strategy generator and thin film design software to offer seamless dvelopment and manufacturing to the highest levels of process performance