Process Control
Good system and process control lies at the heart of achieving industry leading throughput and yields.
Software Platforms
With 50 years experience in developing dedicated platforms along with our customers we learnt the requirements are simple.
- Flexible enough for process designers
- Easy to use for operations and maintenance
- Powerful enough for production and quality control
Today’s state of the art "Khan" offers full closed loop and data logging from system pump down to vent.
Process control technology
From Jan 2011: New GSM Broadband down to 250nm
From Jan 2011: Optical Pyrometry with <3% temp. uniformity across the calotte at 300C
From our QSK610, 6 way quartz crystal monitoring system to our broadband optical monitor GSM1100 we offer a range of deposition control options including integrated RGAs and Sputter Process Monitors. For co-deposition, thick layer and other special processes we offer customized solutions. Contact us
