Wafer Level Optics

Evatec brings semiconductor wafer handling capability and precision optics thin film know how together for the perfect production solution

Evatec Wafer Level Optics Know-how

  • Automated wafer handling , tracking and tracebility
  • Enhanced evaporation and sputter technologies for optically and environmentally stable dielectric stacks
  • In situ GSM Broadband Optical Monitoring for layer termination in the most complex stack designs
  • Optics Tool Box for full integration all the way from coating design through recipe generation and final coating execution to save development times and production costs
  • In situ process re-optimisation with mid process recipe adjustments for yield maximisation handling high added value 8 inch silicon wafers with multiple processing

Select a process tool

Choose from BAK evaporation platforms between 0.5 and 2.0m. Visit the BAK web pages and learn about Autolaod cassette to cassette wafer handling or download the BAK brochure below. Our Radiance sputter tool offers cluster configuration with direct wafer handling. and options for additional processes on a single platform