BAK size comparison
Step 1: Choose the right size BAK from our biggest range ever
Start by selecting a basic platform size according to your substrate size and preferred batch capacity for standard calotte handling.
Step 2: Choose your sources and process control technologies
View our brochure to learn about tooling options for double sided coating, extended capacity planetary systems or complete bespoke tooling designs.
Step 3: Customise your BAK
Investigate further custom options to build a BAK that’s just right for you.
- "Lift Off" platforms with extended throw for zero side wall coverage
- "Split Chamber" platforms for sensitive source materials and reduced batch cycle times
- Automated Handling options including single wafer transfer, assisted calotte load or full robot load or the calotte and transfer to the coating chamber from font end cassettes