BAK size comparison

Step 1: Choose the right size BAK from our biggest range ever

Start by selecting a basic platform size according to your substrate size and preferred batch capacity for standard calotte handling.

Step 2: Choose your sources and process control technologies

View our brochure to learn about tooling options for double sided coating, extended capacity planetary systems or complete bespoke tooling designs.

Step 3: Customise your BAK

Investigate further custom options to build a BAK that’s just right for you.

  • "Lift Off" platforms with extended throw for zero side wall coverage
  • "Split Chamber" platforms for sensitive source materials and reduced batch cycle times
  • Automated Handling options including single wafer transfer, assisted calotte load or full robot load or the calotte and transfer to the coating chamber from font end cassettes

Bak sizes chart