MSP 1232: Useable area 2.2 SQM / batch
The latest MSP 1232 brings you proven performance and 50% more usable area than before for larger batch quantities or even bigger substrate sizes.
MSP in a nutshell
- Substrate sizes up to 560X380 mm
- Up to 6 sputter cathodes
- Optional integration of plasma source for pre cleaning or new process technologies
- Rapid exchange of substrate tooling for different sizes
- No temperature and environmental shift
Using Evatec’s proven cathode technology and Khan System and Process Controller the MSP1501 handles up to 48 substrates 136mm X270mm in a single batch. The system design is optimized for mass production with high rates, a usable coating area of 2.2m2, high target utilization without compromise on coating specification and simple target exchange.