MSP 1232: Useable area 2.2 SQM / batch

The latest MSP 1232 brings you proven performance and 50% more usable area than before for larger batch quantities or even bigger substrate sizes.

MSP in a nutshell

  • Substrate sizes up to 560X380 mm
  • Up to 6 sputter cathodes
  • Optional integration of plasma source for pre cleaning or new process technologies
  • Rapid exchange of substrate tooling for different sizes
  • No temperature and environmental shift

Platform overview

Using Evatec’s proven cathode technology and Khan System and Process Controller the MSP1501 handles up to 48 substrates 136mm X270mm in a single batch. The system design is optimized for mass production with high rates, a usable coating area of 2.2m2, high target utilization without compromise on coating specification and simple target exchange.