PNL Platforms - Bringing precision in handling and deposition for high yield panel processing

PNL panel processing platforms are designed for high throughput PVE and PVD processes on large area substrates with safe, secure handling and industry leading production yields.

Find out more about the PNL below, then contact us to get your copy of our new Panel Processing capability brochure with more detailed information about Evatec hardware and process capabilities.

Highlights

  • Flexible cluster architecture for single panel processing
  • Processing of glass or highly outgassing organic substrates
  • Panel sizes of 550x550mm
  • Static substrate processes for lowest particle counts
  • Process know-how including FOPLP and Advanced PCB manufacturing

Atmospheric Front End

  • Up to four load port modules with atmospheric robot
  • Integration of Atmospheric Batch Degassers for efficient pre-processing of highly outgassing substrates
  • Integrated Aligner & customer specific requirements like Deionizers and Electrostatic sensors

Platform

  • 5 sided vacuum transport module with vacuum load lock
  • Up to 4 process modules for PVE or PVD processes

Process Modules / Components

  • Full process isolation
  • Atmospheric Batch Degasser(s)
  • Arctic etch technology for highly outgassing substrates
  • Highly uniform, scaleable etch and sputter technologies
  • Custom low temperature processes including AlN deposition

Want to know more?

Please complete our Contact Form to get your copy of our new Panel Processing capability brochure or ask about your own particular application needs.