Rate & Thickness control
Rate & Thickness Control
Evatec closed loop process control technologies enable coatings with precise electrical and optical performance through quartz monitoring, optical monitoring or combinations of both. Evatec's "Optics Toolbox" and "In-situ reoptimisation" are dedicated solutions for high precision optical layers that increase precision and yield in complex optical stacks
Learn more about our control techniques
Evatecs own controller for 5 or 6MHz operation offers integration of up to 4 quartz measuring heads.
Direct broadband measurement at the substrate during deposition offers enhanced accuracy for demanding optical stacks.
Learn how fully automated active recipe adjustments mid process can improve your yields in high precision optical stacks
The perfect tool to reduce development times in HP optical layer processes.