Layer Stoichiometry Control
Perfect stoichiometry in evaporation and sputter processes
Closed loop quartz monitoring of up to 4 individual sources using Evatec's own QCM500 quartz controller delivers accurate deposition of alloys from boat, e gun, or effusion cell sources in our range of BAK Evaporators.
We use Plasma Emission Monitoring (PEM) technology to ensure delivery of correct stoichiometry and high rates in deposition of dielectrics and TCOs on our range of vertical sputter and cluster platforms. Find out more about our range of sputter source technologies and platforms where they are available.