News
“Cautious optimism for 2010” says Evatec CEO Andreas Waelti
2009 was a tough year but there are reasons to be optimistic for 2010
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Evatec announces "Thin Film Powerhouse" at Semicon Europa 2009
Evatec announces its agreement with Corial SAS at Semicon Europa 2009 to deliver PECVD, RIE, and HDP plasma etch solutions
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Take control in etch and PECVD
Evatec's Radiance platform can be equipped with sputter,PECVD, RIE, Microwave and ICP in cooperation with plasma specialist Corial SAS. Take control of your etch processes including GaAs, GaAlAs, InP and GaAlN: [more]
- Precise profile- anisotropic or tapered
- High Selectivity against mask and underlayers
