ProductsView our product range
We deliver thin film tools with “built –in” flexibility for optics, optoelectronics and semiconductor. Choose from our batch and cluster platforms.
Robust source technologies for 24/7 production. Choose from evaporation, PVD, PECVD and ICP etch and dep technologies to fit your application.
ApplicationsSee our thin film process know how
Our applications team is ready to help you identify the right platform and processes. Contact us for help with standard processes or sampling.
Evatec delivers multiple “RADIANCE” cluster sputter tools to a major US GaAs fab supplying products to the RF industry. Read more
Retrofits from Optical Pyrometry to new e gun technologies to increase throughput and yield
Learn about in situ re-optimisation techniques mid process to increase yields.