LLS EVO II
LLS EVO II
The LLS EVO II is the latest generation of the proven LLS platform sputter platform for deposition of metals, TCOs and magnetic films on substrate sizes up to 200X230mm. Now its available with a whole host of new features that raise productivity and reduce your cost of ownership.
Increasing Throughput and lowering Cost of Ownership
- Oval cathode technology for reduced materials consumption and costs in precious metals deposition
- "High Energy Cathode" technology for improved throughput in metallisation processes ( Al & Al Alloys)
- Next generation magnet systems for enhanced target life in deposition of magnetic layers
- New high speed pumping solutions for reduced cycle times
- Enhanced robot handling of wafers / mask packages
Want to know more about the LLS EVO II ?
Got an LLS already?
CLICK HERE to learn how you can upgrade your existing LLS EVO & LLS EVO II tools to the latest standards and download the LLS Retrofit Brochure.
Looking for more general information on Evatec sputter capabilities?
For a complete overview about the range of sputter technologies and platforms with sputter capability in Evatec's portfolio please click on the link below.