LLS EVO II
LLS EVO II
The LLS EVO II is the latest generation of the proven LLS platform sputter platform for deposition of metals, TCOs and magnetic films on substrate sizes up to 200X230mm. Now its available with a whole host of new features that raise productivity and reduce your cost of ownership.
Increasing Throughput and lowering Cost of Ownership
- Oval cathode technology for reduced materials consumption and costs in precious metals deposition
- "High Energy Cathode" technology for improved throughput in metallisation processes ( Al & Al Alloys)
- Next generation magnet systems for enhanced target life in deposition of magnetic layers
- New high speed pumping solutions for reduced cycle times
- Enhanced robot handling of wafers / mask packages
Find the right sputter platform for you
Click here to see more details about the LLS EVO II and view the brochure online. Deposition of metals, TCOs and Magnetics is also available on Evatec's cluster platforms. To find out more about RADIANCE or CLUSTERLINE® click on the links below.