Proven reactor designs on proven stand alone and cluster platforms
PECVD technology enables high uniformity, pinhole free films with high breakdown voltages, tuneable refractive index and control of film stress from tensile to compressive.
Evatec PECVD solution benefits
- The manual cleaning necessary for conventional reactors is eliminated
- Know how in low temperature processes <80C
- Proven processes for MEMS, LEDS and Optics
- Stand alone or cluster solutions