Contact us for full details of our capabilities in PECVD according to your application requirements
PECVD technology enables high uniformity, pinhole free films with high breakdown voltages, tuneable refractive index and control of film stress from tensile to compressive.
Evatec PECVD solution benefits
- Custom solutions
- Know how in low temperature processes <80C
- Proven processes for MEMS, LEDS and Photonics
Choose your PECVD platform
PECVD technology is available on Evatec's CLUSTERLINE® 200 II . Its also available for custom applications including DLC coating on Evatec's BAK . Contact us for full details of our capabilities in PECVD according to your application requirements.