PECVD Technology

PECVD Technology

Proven reactor designs on proven stand alone and cluster platforms

PECVD technology enables high uniformity, pinhole free films with high breakdown voltages, tuneable refractive index and control of film stress from tensile to compressive.

Evatec PECVD solution benefits

  • The manual cleaning necessary for conventional reactors is eliminated 
  • Know how in low temperature processes <80C
  • Proven processes for MEMS, LEDS and Optics
  • Stand alone or cluster solutions

Choose your PECVD platform

PECVD technology is available on Evatec's CLUSTERLINE® or RADIANCE platforms or as a stand alone system in cooperation with partner CORIAL SAS

Want to know more?

If you would like to know more about specific PECVD processes available from Evatec please contact your local sales & service representative or complete our Contact Form