PECVD Technology

PECVD Technology

Contact us for full details of our capabilities in PECVD according to your application requirements

PECVD technology enables high uniformity, pinhole free films with high breakdown voltages, tuneable refractive index and control of film stress from tensile to compressive.

Evatec PECVD solution benefits

  • Custom solutions
  • Know how in low temperature processes <80C
  • Proven processes for MEMS, LEDS and Photonics

Choose your PECVD platform

PECVD technology is available on Evatec's CLUSTERLINE® 200 II . Its also available for custom applications including DLC coating on Evatec's BAK . Contact us for full details of our capabilities in PECVD according to your application requirements.

Want to know more?

If you would like to know more about specific PECVD processes available from Evatec please contact your local sales & service representative or complete our Contact Form